Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE

Ishizaka, Akitoshi

doi:10.1149/1.2108651

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Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE

Author(s): Akitoshi Ishizaka

Publication date Created: 1986

Publication date (Print): 1986

Journal: Journal of The Electrochemical Society

Publisher: The Electrochemical Society

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Journal ID (publisher-id): JESOAN

Title: Journal of The Electrochemical Society

Abbreviated Title: J. Electrochem. Soc.

Publisher: The Electrochemical Society

ISSN (Print): 00134651

Publication date Created: 1986

Publication date (Print): 1986

Volume: 133

Issue: 4

Page: 666

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DOI: 10.1149/1.2108651

SO-VID: ce6a649f-c86d-4054-a7ce-2eb838cff528

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Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE

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