The materials challenge in diffraction-unlimited direct-laser-writing optical lithography.

Fischer, Joachim; von Freymann, Georg; Wegener, Martin

doi:10.1002/adma.201000892

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The materials challenge in diffraction-unlimited direct-laser-writing optical lithography.

Author(s): Joachim Fischer ¹ , Georg von Freymann , Martin Wegener

Publication date (Electronic): Aug 24 2010

Journal: Advanced materials (Deerfield Beach, Fla.)

Publisher: Wiley-Blackwell

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Journal ID (iso-abbrev): Adv. Mater. Weinheim

Title: Advanced materials (Deerfield Beach, Fla.)

Publisher: Wiley-Blackwell

ISSN (Electronic): 1521-4095

ISSN (Print): 0935-9648

Publication date (Electronic): Aug 24 2010

Volume: 22

Issue: 32

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[1 ] Institut für Angewandte Physik and DFG-Center for Functional, Nanostructures, Karlsruhe Institute of Technology, Wolfgang-Gaede-Strasse 1, D-76131 Karlsruhe, Germany. joachim.fi scher@kit.edu

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DOI: 10.1002/adma.201000892

PubMed ID: 20593434

SO-VID: cee45a25-d004-4253-a59b-fb48735f6420

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The materials challenge in diffraction-unlimited direct-laser-writing optical lithography.

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