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      All-silicon bistable micromechanical fiber switch based on advanced bulk micromachining

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          Silicon as a mechanical material

          K.E. Petersen (1982)
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            Thermally excited silicon microactuators

            W. Riethmuller, W Benecke (1988)
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              SCREAM I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures

              Kevin A. Shaw, Noel C. MacDonald, Z.Lisa Zhang (1994)
              Article 0 comments Cited 38 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: IEEE Journal of Selected Topics in Quantum Electronics
                Abbreviated Title: IEEE J. Select. Topics Quantum Electron.
                Publisher: Institute of Electrical and Electronics Engineers (IEEE)
                ISSN (Print): 1077260X
                Publication date (Print): Jan.-Feb. 1999
                Volume: 5
                Issue: 1
                Pages: 46-51
                Article
                DOI: 10.1109/2944.748104
                SO-VID: d9c1a695-73e5-49c9-8daa-145ed9524da0
                Copyright © © 1999
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