Title:
Journal of Microelectromechanical Systems
Abbreviated Title:
J. Microelectromech. Syst.
Publisher:
Institute of Electrical and Electronics Engineers (IEEE)
ISSN
(Print):
1057-7157
Publication date Created:
April
2004
Publication date
(Print):
April
2004
Volume: 13
Issue: 2
Pages: 137-146
Article
DOI: 10.1109/JMEMS.2004.825308
SO-VID: 9f109192-3b93-42c5-b90c-94e21c9b4cfd
Copyright © ©
2004