Title:
Journal of Micromechanics and Microengineering
Abbreviated Title:
J. Micromech. Microeng.
Publisher:
IOP Publishing
ISSN
(Print):
0960-1317
Publication date Created:
May
01 2003
Publication date
(Print):
May
01 2003
Volume: 13
Issue: 3
Pages: 359-366
Article
DOI: 10.1088/0960-1317/13/3/302
SO-VID: e0546816-64b5-47d2-89a6-c4c436d9529b
Copyright © ©
2003