- Record: found
- Abstract: not found
- Article: not found
ZnO/Al2O3 nanolaminates fabricated by atomic layer deposition: growth and surface roughness measurements
Read this article at
ScienceOpenPublisher
There is no author summary for this article yet. Authors can add summaries to their articles on ScienceOpen to make them more accessible to a non-specialist audience.
Related collections
Most cited references52
- Record: found
- Abstract: not found
- Article: not found
Surface Chemistry for Atomic Layer Growth
J. Klaus, S M George, A. W. Ott (1996)
- Record: found
- Abstract: not found
- Article: not found
Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry
J.W. Klaus, J.M. Johnson, S.M. George … (1997)
- Record: found
- Abstract: not found
- Article: not found
Surface chemistry of Al2O3 deposition using Al(CH3)3 and H2O in a binary reaction sequence
A.C. Dillon, A.W. Ott, J.D. Way … (1995)