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      Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation

      Author(s): , , ,
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      Journal: IEEE Journal of Solid-State Circuits
      Publisher: Institute of Electrical and Electronics Engineers (IEEE)

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          Mechanical-thermal noise in micromachined acoustic and vibration sensors

          T.B. Gabrielson (1993)
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            Single-chip surface micromachined integrated gyroscope with 50°/h Allan deviation

            J.F. Chang, S.R. Lewis, S.J. Sherman … (2002)
            Article 0 comments Cited 37 times – based on 0 reviews     Review now
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              Modern Inertial Technology

              Anthony Lawrence (1993)
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                Author and article information

                Journal
                Title: IEEE Journal of Solid-State Circuits
                Abbreviated Title: IEEE J. Solid-State Circuits
                Publisher: Institute of Electrical and Electronics Engineers (IEEE)
                ISSN (Print): 0018-9200
                Publication date Created: December 2002
                Publication date (Print): December 2002
                Volume: 37
                Issue: 12
                Pages: 1860-1866
                Article
                DOI: 10.1109/JSSC.2002.804345
                SO-VID: ea2d0598-eb02-421f-adce-aed8222499fb
                Copyright © © 2002
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