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      Pt2Si and PtSi formation with high‐purity Pt thin films

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      Applied Physics Letters
      AIP Publishing

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          Principles and applications of ion beam techniques for the analysis of solids and thin films

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            Kinetics and mechanism of platinum silicide formation on silicon

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              LOW‐TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM

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                Author and article information

                Journal
                Applied Physics Letters
                Appl. Phys. Lett.
                AIP Publishing
                0003-6951
                1077-3118
                July 1977
                July 1977
                : 31
                : 1
                : 43-45
                Article
                10.1063/1.89473
                eb3bb060-1193-489c-921a-330259851051
                © 1977
                History

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