Journal ID (publisher-id): JVTBD9
Title:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Abbreviated Title:
J. Vac. Sci. Technol. B
Publisher:
American Vacuum Society
ISSN
(Print):
0734211X
Publication date Created: 2004
Publication date
(Print):
2004
Volume: 22
Issue: 6
Page: 3233
Article
DOI: 10.1116/1.1815305
SO-VID: 203309fd-0971-4cd8-af11-6380e38aba92
Copyright © ©
2004