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      Fabrication of optical waveguide devices using gas-assisted UV micro/nanoimprinting with soft mold

      Author(s): , , ,
      Publication date (Electronic):
      Journal: Polymers for Advanced Technologies
      Publisher: Wiley

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          Imprint of sub-25 nm vias and trenches in polymers

          Stephen Y Chou, Peter R. Krauss, Preston Renstrom (1995)
          Article 0 comments Cited 71 times – based on 0 reviews     Review now
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            Nanoimprint lithography

            Stephen Y Chou (1996)
            Article 0 comments Cited 62 times – based on 0 reviews     Review now
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              Microcontact printing of self-assembled monolayers: applications in microfabrication

              Enoch Kim, Amit N Kumar, James L. Wilbur … (1996)
              Article 0 comments Cited 31 times – based on 0 reviews     Review now
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                Author and article information

                Journal
                Title: Polymers for Advanced Technologies
                Abbreviated Title: Polym. Adv. Technol.
                Publisher: Wiley
                ISSN (Print): 10427147
                ISSN (Electronic): 10991581
                Publication date Created: November 2007
                Publication date (Print): November 2007
                Publication date (Electronic): 2007
                Volume: 18
                Issue: 11
                Pages: 876-882
                Article
                DOI: 10.1002/pat.921
                SO-VID: 9d5a10ff-db83-4595-aef0-009084ac2f9b
                Copyright © © 2007
                License:

                http://doi.wiley.com/10.1002/tdm_license_1.1

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