Title:
Plasma Sources Science and Technology
Abbreviated Title:
Plasma Sources Sci. Technol.
Publisher:
IOP Publishing
ISSN
(Print):
0963-0252
ISSN
(Electronic):
1361-6595
Publication date Created:
November
01 2005
Publication date
(Print):
November
01 2005
Volume: 14
Issue: 4
Pages: 722-733
Article
DOI: 10.1088/0963-0252/14/4/011
SO-VID: a7673447-8018-41b2-8658-3338a67e0b73
Copyright © ©
2005