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Chemical mechanical planarization (CMP) of on-axis Si-face SiC wafer using catalyst nanoparticles in slurry
Yan Zhou, Guoshun Pan, Xiaolei Shi, Hua Gong, Guihai Luo, Zhonghua Gu, . Zhou, Zhou, Y Zhou, G.-S. Pan, X.L. Shi, H. GONG, G.H. Luo, Z.H. Gu, G Pan, X. Shi, H. Gong, G Luo, Z Gu
2014
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